Plasma Charging Damage

Name: Plasma Charging Damage
Brand: Springer London Ltd
SKU: 2290186
Author: Kin P. Cheung

Kin P. Cheung

Springer London Ltd

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

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